| Summary: | 碩士 === 中華大學 === 機械與航太工程研究所 === 94 === The purposes of this study are to construct the process model and develop a spin coating process controller for the spin-coat process. The spin coating process model, the foundation of the process controller, is constructed by design of experiment (DOE). In order to improve the Blu-ray Disc Hard-Coat yield and quality, an advanced process control is employed to early predict and diagnose the possible unusual process deviation so as to adjust the parameters for the equipment in a normal operation condition. First, we identify parameters that affect thin film thickness and uniformity of the cover layer. Then DOE method is used to construct the spin coating model. The recursive procedure is used to update model coefficients and develop the process controller for containing the accuracy and stability of process model Results show that the advanced process control can not only steadily control the manufacturing process, reduce the failure rate, but also increase the efficiency of equipment and the process.
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