| Summary: | 碩士 === 中華大學 === 機械與航太工程研究所 === 94 === The objective of this study is to develop a microscale, valveless, micro-particle counter. This micro-device consists of a micro pump coupled with the valveless micro channel. And a reaction electrode with a width of 100 um is coated near the channel exit for particle measurement. All of these components are integrated on a PMMA substrate. The speaker which is pasted in a pump chamber with a diameter of 20 mm and a depth of 600 um is used as the fluids actuator source. The nozzle-diffuser channel that has a neck-width of 400 um, a diffusion angle of 15, and a length of 5 mm is designed to guide the flow direction. The change of the resistance measured from the reaction electrode is amplified and recorded for further data reduction.
A maximum volumetric flowrate of 151.93 ul/min is produced when the micropump is operated with a square wave function at a frequency of 10 Hz and a voltage of 5 V. In the present study, the developed valveless, micropump system is superior to the reported ones concerning the fabrication feasibility and cost. This would improve the development of microfluid devices for application in the field of biomedical engineering.
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