| Summary: | 碩士 === 國立中正大學 === 光機電整合工程所 === 94 === In this study, we demonstrate two novel methods to fabricate of microlens array. In the first method, the breath-figure formation technique was employed to fabricate microlens array template on polystyrene (PS) polymer thin films. The hexagonal packed micropores templates were formed by self assembling condensed water droplets onto the surface of PS polymer solution. Then, the spherical microlens array was obtained by imprinting from the PS templates. The diameter of microlens can be controlled by changing the ambient temperature and humidity and also temperature at the glass substrate.
The second method is multi-exposure two-beam holography interference technique. Utilization shrinkage effect of negative photoresist SU8, this interference was employed to fabricate microlens array directly. Using this technique, we could easily control the period and radius curvature of microlens and obtained large-area, uniform and different kinds of microlens arrays. Comparing with traditional methods, our techniques are more easy and simple. They are very suitable for mass-production of microlens array.
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