The Study of Sensing and Driving System for Gyroscope

• Main Authors: Chi-Ming Lo, 羅啟銘
• Other Authors: Shuenn-Yuh Lee
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/28153574766448897766

碩士 === 國立中正大學 === 電機工程所 === 94 === This thesis is intended to develop an angular rate sensing circuit, the sensing circuit can detect the displacement in the gyroscope system. The detecting signal will be modulated by 200KHz and amplified by capacitive sensing preamplifier, and then be demodulated and filtered by low-pass filter wish 20kHz bandwidth to recover as an original signal. In addition, the analog-to-digital converter is required to further quantize the analog signal for the digital signal processing, the digital data can be used to calibrate the gyroscope system. This chip has been implemented by using TSMC 0.35μm 2P4M Mixed Signal process. In order to accomplish the sensing function, the system in this project has five circuit blocks including an oscillator to provide the required modulated signal, a capacitive sensing preamplifier, switched-capacitor demodulator, analog filter, and analog-to-digital converter. The object of this thesis not only designs and implements the integrated circuits of the subsystem blocks, but also will integrates the whole system including angular rate as a single chip to achieve a high-quality and low-cost product in the future.