Nanotribology behavior andMechanical Property of Thin Films forWafers
碩士 === 國立中正大學 === 機械工程所 === 94 === The mechanical property of nano-scale is central for the development of nano science and technology. The mechanical property at the nano-scale can be different from that of bulk material due to effects such as surface effect, size effect and quantum effect. This st...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/15616090250027786705 |