The investigation of mechanical properties of thin hard coating in the nanoindentation process

• Main Authors: Fang-Yi Deng, 鄧芳怡
• Other Authors: Tze-Chi Hsu
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/14203675287204028146

碩士 === 元智大學 === 機械工程學系 === 93 === The widespread use of thin hard physical vapor deposited (PVD) coatings such as Diamond-like carbon (DLC) in various technical applications necessitates the knowledge of their mechanical properties. In recent years, the nanoindentation experiment becomes a very successful technique to investigate the mechanical properties of thin coating. A very low load is applied on the specimen by using the Berkovich indenters and then the elastic modulus, as well as the hardness, can be determined from the recorded load-displacement curve. In this work, we used the finite element method to simulate the nanoindentation process. Due to the complexity of the phenomena involved in the indentation process, the finite element program MARC which allows effective modeling of bilinear mechanical property such as the elastic modulus and tangent modulus was applied to simulate the deformation behavior of the material. By comparing the numerical simulations with the results obtained from nanoindentation experiment, it is possible to extract precisely the stress-strain curve of the diamond-like carbon thin films on tungsten carbide substrates and describes the mechanical properties of thin hard coating by using a bilinear model.