Study of Micro-Electro-Mechanical Systems Technique Based on Titanium Oxide Thin Film for Extended Gate Field Effect Transistor
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 93 === In this thesis, it emphasizes on the study of the extended gate field effect transistor (EGFET). The full text can be divided into four topics. In the first topic, it was used the sputtering method to prepare the titanium oxide (TiO2) thin film, and the stru...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14437999841133659409 |