FABRICATION OF HIGH-FREQUENCYSURFACE ACOUSTIC WAVE TRANSDUCERSUSINGNEAR-FIELD PHASE SHIFTCONTACT-MODE PHOTOLITHOGRAPHYWITH AN ELASTOMERIC PHASE MASK
碩士 === 大同大學 === 材料工程學系(所) === 93 === Abstract Surface-acoustic wave (SAW) filters operating at frequency in the 1 to 3 GHz-range have been widely used in the applications of mobile, wireless, cable modem, cellular phone and remote control. Current lithography techniques are feasible for SAW device...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60109721093058567430 |