| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 93 === Error of the tool profile is an important factor which affects the precision in ultra-precision diamond turning operation. Traditionally, the measure method of the tool profile is used LVDT directly to contact and detect the tool profile. But the precision of this method was depend on the resolution of probe which limited around 1~10μm. Additionally, it is running the risk of damaging the delicate tool tip. In this study, we proposed a new optical measurement method which can improve the disadvantages of traditional measurement method. It used the image processing technology combined moment-preserving principle, which can calculate the tool profile precision to sub-pixel. In addition, the wear of tool can be compensated on-line by this method and ensure the measurement precision of tool profile. From those experimental results showed the error of the tool profile can be controlled in the range of about 0.2μm.
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