| Summary: | 碩士 === 國立臺北科技大學 === 機電整合研究所 === 93 === Lead-zirconate-titanate (PZT) ceramic is a significant material for making the force-sensing device; however its piezoelectric characteristic complicates the readout circuit. Charge amplifier is one of the main method for measuring piezoelectric characteristic through voltage-mode operational amplifier. In general, the traditional charge amplifier has a positive and a negative power sources, and the charge amplifier must be connected to the outside of the sensor. These properties cause a higher cost and a larger size. Accordingly, we redesign the charge amplifier, which could not only have the small size chip, but also fit to the package of sensor. This amplifier only work with one single power source, so it can decrease the power consumption. So we can reduce the signal lines in the chip. In addition, the temperature dependences of the designed sensor which installed inside the mold cavity, may cause huge heat in the measuring process. Then we proposed a bandgap reference circuit to improve the temperature-dependent effects. To sum up, the analyses of our signal processing circuit are simulated and verified by HSPICE, and it’s simulation and manufacture are based on TSMC 0.35μm 2P4M procedure.
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