Fabrication of Thick Porous-Si Layers by Graded-Etching Technology for Optical-Sensing Applications
碩士 === 南台科技大學 === 電機工程系 === 93 === Porous silicon layers (PSL’s) that produced from the constant anodization-current process were usually not thick enough to get high photo-resposivity. Furthermore, because those thin PSL’s usually led to quite flat light-absorption response spectra, they were not s...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55413627535584953910 |