A Study on Developing a Low Cost Micro-meter Measuring System

• Main Authors: Shin-Yi Chen, 陳欣義
• Other Authors: Shin-Chen Peng
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/73096879244772233163

碩士 === 樹德科技大學 === 資訊工程學系 === 93 === ABSTRACT In this research，we developed a low-cost、high-precision、Non-Contact laser optical probe system based on the laser-pickup of CD player. In order to satisfy the specifications for industry applications, the measurement range is enlarged by replacing the objective lens with greater focal length. The relationship between the S-curve and displacement is calibrated and mapped through a high order polynomial, which is used to obtain the distance between the laser probe and the object surface. Experiments are performed so as to demonstrate its feasibility for surface profile measurement and micro-displacement measurement. The system accuracy could achieve to 1.0 μm in the measuring range about 1.0 mm with a competitive price less than 5000 NT.