Analytical Solutions to the Threshold Voltage of Micro Curled Beams
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === The analytical modeling of the electrostatic devices is quite complicated and difficult in virtue of the electric-mechanical coupling effect, the nonlinearity of the electrostatic force, the fringe field, and the pre-deformation of the micro-structure caused by t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69439106064591898627 |