Analysis of Thermal Radiation in a Rapid Thermal Processor Using Ray Tracing
碩士 === 國立臺灣大學 === 應用力學研究所 === 93 === ABSTRACT Because the lamps can radiate high intensity of thermal radiation onto a wafer within a short time, a RTP features rapid heating, low thermal budget, and low dopant diffusion in semiconductor manufacturing. As the semiconductor industry progresses to na...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27713482579809026800 |