微元件內部垂直輪廓量測系統之研究
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Measuring the vertical profile inside a micro part is a difficult but important task, especially when micro holes are frequently encountered nowadays. However, when the interior dimension of the micro part is smaller than 1mm, the smallest dimension of the pin-b...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37491148115662298757 |