The development of an evaluation method based on the investment return for AMHS in a semiconductor plant

碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Because of the advent of 12-inch semiconductor wafers, the automated material handling system (AMHS) becomes a necessary investment to the industry. The main evaluation methods for most of production equipments are normally based on the investment return. For th...

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Bibliographic Details
Main Authors: Hui-Ta Cheng, 鄭暉達
Other Authors: 謝淑華
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/70083640380751694180

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