The development of an evaluation method based on the investment return for AMHS in a semiconductor plant
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Because of the advent of 12-inch semiconductor wafers, the automated material handling system (AMHS) becomes a necessary investment to the industry. The main evaluation methods for most of production equipments are normally based on the investment return. For th...
Main Authors: | Hui-Ta Cheng, 鄭暉達 |
---|---|
Other Authors: | 謝淑華 |
Format: | Others |
Language: | zh-TW |
Published: |
2005
|
Online Access: | http://ndltd.ncl.edu.tw/handle/70083640380751694180 |
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