The development of an evaluation method based on the investment return for AMHS in a semiconductor plant
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Because of the advent of 12-inch semiconductor wafers, the automated material handling system (AMHS) becomes a necessary investment to the industry. The main evaluation methods for most of production equipments are normally based on the investment return. For th...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/70083640380751694180 |