Research and development of dynamic 3D measurement using stroboscopic interferometric microscopy
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === A dynamic 3-D profilometer with nano-scale measurement resolution was successfully developed using stroboscopic illumination and white-light vertical scanning techniques. Microscopic interferometry is a powerful technique for static and dynamic characterization...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01602875399069529574 |