| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === A dynamic 3-D profilometer with nano-scale measurement resolution was successfully developed using stroboscopic illumination and white-light vertical scanning techniques. Microscopic interferometry is a powerful technique for static and dynamic characterization of micro electromechanical systems (MEMS). The optical interferometry technique is quick, non-destructive, non-contact, and can offer a high density lateral resolution with excellent depth measurement sensitivity. As MEMS devices move rapidly towards commercialization, the issue of accurate dynamic characterization has emerged as a major challenge in their design and fabrication process.
In view of this need, previous theory of various optical interferometry systems and technologies for dynamic 3-D surface profilometry were carefully investigated. Furthermore, a microscopic prototype based on white-light stroboscopic interferometry using vertical scanning principle was developed to achieve dynamic full-field profilometry and characterization of MEMS devices. A micro cantilever beam used in AFM was measured to verify the system capability and use ANSYS to make the dynamic simulation analysis of the theory. Using the developed measurement system, the measurement bandwidth can reach a vibration resonant frequency of 1.067 kHz or higher. The MEMS systems or component can be fully characterized with a lateral resolution up to 1 μm and a vertical measurement resolution up to 1 nm, as well as tens micrometers of vertical measurement range can be achieved. Evaluated on the performance of the stroboscopic light and control unit, it confirmed that the dynamic measurement frequency bandwidth of the developed system can reach up to 2MHz or higher.
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