Design and implementation of Pressure Sensor and Read-out circuits utilizing CMOS Process

• Main Authors: Yen-An Chiang, 姜彥安
• Other Authors: Gwo-Jen Jan
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/62086211820181981491

碩士 === 國立臺灣大學 === 電機工程學研究所 === 93 === In the recent years, due to the invention of various digital camcorders and pressure sensors which are easy to carry with DC voltages supplied by batteries, CMOS technology makes sensor more attractive than ever. Since late 90’s, Micro Electro Mechanical Systems (MEMS) revolutionize the traditional ways of electrical, electronic, and mechanical engineering which have the same type of characteristics as IC. Now, this technology has even advanced to the era of wireless connection, optical communication and bio-engineering products. Using this technique, it has many advantages such as minimizing chips’ volume, low consumption of power, and low production fees. It is also widely used in sensor and driver. We can see that micro-system is the trend of future engineering field. Also, in terms of the sensors, pressure sensor has the highest growing rate in the market. This thesis has finished and developed useful pressure sensing system, calculation amplifier and status amplifier which are merged into integrated circuit. In addition, the thesis had successfully simulated using Pspice based on TSMC 0.35 um CMOS MEMS to develop capacitor- pressure sensor and read out the circuits using Pspice will be the first step of simulation. This article’s best contribution is to start up our laboratory room in order to self-design and produce analog integrated circuit which can be used in detection of low signals and construct our laboratory’s library on integrated circuits. In the future, it is usable for other designers to directly utilize this circuit to design high level analog integrated circuits.