Fabrication and Electro-optical Characteristic Analysis of Metallic Photonic Box Structure

• Main Authors: Wo-Chung Liu, 劉斡中
• Other Authors: Ching-Fuh Lin
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/22313248277836237353

碩士 === 國立臺灣大學 === 光電工程學研究所 === 93 === The evolution of artificial light sources has played an important role in technology development. In ancient times, people had tried to use torch to obtain light in dark. Thomas Alva Edison invented the first lamp in 1878. Since then the mankind has never ceased the intension to invent better artificial illumination sources. With the advancement of VLSI technology, it is no longer impossible to fabricate nano-scale patterns. This leads to the flourish of light emitting diode technology and starts another ``illumination revolution''. In this dissertation, we propose a new illumination structure, named “metallic photonic box”. Such structure is aimed at replacing the current illumination technology to achieve no pollution and high efficiency lighting. We design and fabricate photonic crystal structures with dielectric cube wrapped by metal on silicon wafer. The dimension of the dielectric cube is designed to be 1μm. The structure is successfully made by using standard VLSI process such as exposure, development, dry etch, and evaporation. The cross-section view of the sample is verified by scanning electron microscope. Furthermore, another metallic photonic box structure with dimension around 300nm is also made and measured. We also show the ability of making nano-scale patterns on photoresist through the help of deep UV mask aligner. Finally, an energy transfer structure is proposed. The energy transfer mechanism is not observed before. It is capable of transferring part of the energy of incident 532nm laser to 300nm. The converted signal is proportional to the incident laser energy. In addition, the spectral width is further reduced after the input pumping intensity exceeds 30mW. It is expected that, with the research of such metallic photonic box structure, the artificial illumination will usher in a new era. We hope that future illumination and optical application demands can be fulfilled by this new concept.