Fabrication of Blue-Laser Zn-Ni Co-diffused Mach-Zehnder Modulator

• Main Authors: Cho-Yan Chen, 陳卓彥
• Other Authors: Way-Seen Wang
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/63102397652415851181

碩士 === 國立臺灣大學 === 光電工程學研究所 === 93 === In this work, Zn-Ni:LiNbO3 single-mode waveguides and Mach-Zehnder modulators operated at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the largest linewidth of the Zn-Ni co-diffused waveguides should be about 1.5um, which is smaller than that of Ti-diffused waveguides, 2.5um. The optical confinement of the waveguides is optimized by diffusing at 830ºC for 60min when the thicknesses of nickel and zinc are 100Å and 500Å, respectively. Moreover, the Zn-Ni:LiNbO3 waveguides are free of lithium out-diffusion as that found in Ti:LiNbO3 waveguides. The Mach-Zehnder modulators operating at blue-laser wavelength are also demonstrated, the half voltage and the extinction ratio of the device are found to be 6.5V and 7dB, respectively.