Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids

碩士 === 國立清華大學 === 微機電工程研究所 === 93 ===

Bibliographic Details
Main Authors:	Chu Chun Tai, 戴竹君
Other Authors:	Yong-Chien Ling
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/71193385418297206805

id	ndltd-TW-093NTHU5657008
record_format	oai_dc
spelling	ndltd-TW-093NTHU56570082016-06-06T04:11:35Z http://ndltd.ncl.edu.tw/handle/71193385418297206805 Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids 表面聲波感測器偵測胺類氣體與超臨界流體清洗光阻殘餘物 Chu Chun Tai 戴竹君碩士國立清華大學微機電工程研究所 93 Yong-Chien Ling 凌永健 2005 學位論文 ; thesis 101 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 微機電工程研究所 === 93 ===
author2	Yong-Chien Ling
author_facet	Yong-Chien Ling Chu Chun Tai 戴竹君
author	Chu Chun Tai 戴竹君
spellingShingle	Chu Chun Tai 戴竹君 Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
author_sort	Chu Chun Tai
title	Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
title_short	Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
title_full	Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
title_fullStr	Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
title_full_unstemmed	Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
title_sort	surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
publishDate	2005
url	http://ndltd.ncl.edu.tw/handle/71193385418297206805
work_keys_str_mv	AT chuchuntai surfaceacousticwavesensorfordetectingaminevaporsandremovalofphotoresistresidueusingsupercriticalfluids AT dàizhújūn surfaceacousticwavesensorfordetectingaminevaporsandremovalofphotoresistresidueusingsupercriticalfluids AT chuchuntai biǎomiànshēngbōgǎncèqìzhēncèànlèiqìtǐyǔchāolínjièliútǐqīngxǐguāngzǔcányúwù AT dàizhújūn biǎomiànshēngbōgǎncèqìzhēncèànlèiqìtǐyǔchāolínjièliútǐqīngxǐguāngzǔcányúwù
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Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids

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