Design of a CMOS-MEMS Band-Stop Filter and a 10 GHz Voltage-Controlled Oscillator

• Main Authors: Shin-Chuan Huang, 黃信川
• Other Authors: Michael S.-C. Lu
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/44398421752529193192

碩士 === 國立清華大學 === 電子工程研究所 === 93 === Due to the high frequency loss from the low resistivity Silicon substrate, the applications of passive component in MIC (microwave integrated circuits) are limited. In this thesis, we use the methods of ground-shielding and MEMS(MicroElectroMechanical system) process to improve the high substrate coupled loss, and enhance the quality factor. The microwave filter fabricated by TSMC 0.35μm 2P4M process, and the half-wavelength hair-pin-like resonator was designed to resonate at 38 GHz to form a band-stop filter. To enhance the quality factor of the filter, the CPS (coplanar stripline) is chosen to prevent the substrate coupled loss. The quality factor is about 20 at the center frequency. The other part of the thesis is the CMOS MEMS VCO (Voltage-Controlled oscillator). In the VCO circuit, the cross-coupled architecture was selected, and fabricated by TSMC 0.18μm 1P6M process. Due to the low quality of inductor provided by the process, we have designed a suitable inductor with improved the quality factor by use of post CMOS MEMS process. The power consumption and phase noise of the VCO can be improved.