A Bulk-micromachined SOI Micro Media Actuator for Mass Data Storage
碩士 === 國立清華大學 === 電子工程研究所 === 93 === In MEMS technology, there are many thin-film materials which can be applied to fabricate actuators. The material properties of silicon are better than those of metal. We propose a bulk-mocromachining process using the SOI (Silicon On Insulator) wafer to fabricate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53827209383737879201 |