Design and Fabrication of an Integrated Micro Gyroscope
碩士 === 國立清華大學 === 電子工程研究所 === 93 === This work describes design, fabrication of micro-electro-mechanical systems (MEMS) gyroscope. It focuses on the CMOS-MEMS (Complementary-Metal-Oxide Semiconductor) thin film lateral accelerometer and vertical gyroscope design .Structure fabricated by the post CM...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/89361212309296784044 |