Design and Fabrication of an Integrated Micro Gyroscope
碩士 === 國立清華大學 === 電子工程研究所 === 93 === This work describes design, fabrication of micro-electro-mechanical systems (MEMS) gyroscope. It focuses on the CMOS-MEMS (Complementary-Metal-Oxide Semiconductor) thin film lateral accelerometer and vertical gyroscope design .Structure fabricated by the post CM...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/89361212309296784044 |
| Summary: | 碩士 === 國立清華大學 === 電子工程研究所 === 93 === This work describes design, fabrication of micro-electro-mechanical systems (MEMS) gyroscope. It focuses on the CMOS-MEMS (Complementary-Metal-Oxide Semiconductor) thin film lateral accelerometer and vertical gyroscope design .Structure fabricated by the post CMOS-MEMS surface micromachining process. The mass displacement resulted from external acceleration is in the angstrom to nanometer range. Such small mass and displacement bring challenges to detect the extreme small signals, which are under 1 mV/G and only a fraction change for the sensing capacitance
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