Investigation of high aspect ratio hole clean by Ultrasonic wave

碩士 === 國立清華大學 === 動力機械工程學系 === 93 ===

Bibliographic Details
Main Author: 廖元宏
Other Authors: 王志宏
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/35491237362130815338
id ndltd-TW-093NTHU5311100
record_format oai_dc
spelling ndltd-TW-093NTHU53111002016-06-06T04:11:37Z http://ndltd.ncl.edu.tw/handle/35491237362130815338 Investigation of high aspect ratio hole clean by Ultrasonic wave 超音波高深寬比微通孔清洗研究 廖元宏 碩士 國立清華大學 動力機械工程學系 93 王志宏 陳興 2005 學位論文 ; thesis 136 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 動力機械工程學系 === 93 ===
author2 王志宏
author_facet 王志宏
廖元宏
author 廖元宏
spellingShingle 廖元宏
Investigation of high aspect ratio hole clean by Ultrasonic wave
author_sort 廖元宏
title Investigation of high aspect ratio hole clean by Ultrasonic wave
title_short Investigation of high aspect ratio hole clean by Ultrasonic wave
title_full Investigation of high aspect ratio hole clean by Ultrasonic wave
title_fullStr Investigation of high aspect ratio hole clean by Ultrasonic wave
title_full_unstemmed Investigation of high aspect ratio hole clean by Ultrasonic wave
title_sort investigation of high aspect ratio hole clean by ultrasonic wave
publishDate 2005
url http://ndltd.ncl.edu.tw/handle/35491237362130815338
work_keys_str_mv AT liàoyuánhóng investigationofhighaspectratioholecleanbyultrasonicwave
AT liàoyuánhóng chāoyīnbōgāoshēnkuānbǐwēitōngkǒngqīngxǐyánjiū
_version_ 1718296907318558720