The DAWN Fabrication Platform for Three Dimensional Silicon Micromachining and Its Applications
博士 === 國立清華大學 === 動力機械工程學系 === 93 === This study has successfully demonstrated a DRIE assisted wet anisotropic bulk micromachining (DAWN process) to fabricate various three-dimensional MEMS devices on the (100) silicon wafer and SOI wafer. This platform employs the characteristics of the DRIE proces...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13211514016546978604 |