| Summary: | 碩士 === 國立清華大學 === 原子科學系 === 93 === There are two subjects in this thesis. (1) the application of gold nanoparticles for nonvolatile nanocrystal memory capacitor. (2) the application of gold nanoparticles for bio-sensor.
(1) In recent years, the characteristic of flash memory device rely on the shift of threshold voltage to estimate for whether the device memorizes or not, by the electron stored in floating- gate and on the nitrogen structure of silicon layer (ONO ). The formation of the floating -gate of poly silicon and of the nitrogen structure of silicon layer (ONO ) occurs serious leakage. To solove this problem, we develop nanocrystal memory device.
Two different sizes (3.5nm and 15nm) of gold nanocrystal embedded metal oxide semiconductor capacitor devices were fabricated under room temperature and were modified for their electric characteristic.
To compare the fabrication of nanocrystal memory under 350℃ with traditional impant and RTA,it reduce the diffusion on Au to SiO2.If the temperature over 550 ℃, it will occur Au-Si eutectic melt. The frabication at room temperature improve the problem of leakage of memory device. In the part experiment, we take the measurement and analysis of I-V and C-V characterstic for memory capacitors to ensure the good retention significant threshold voltage (Vt) shift and electric characterstic of the gold nanocrystals.
(2) The nano-gap electrodes are fabricated by an E-beam Lithography. Gold nanoparticles are synthesized by a chemical reduction method. The purpose of this thesis is to employ electrical detection on DNA hybridization through single-layer gold nanoparticles that are immobilized on a silicon wafer between nano-gap gold electrodes. In studies, we change the concentrations of complementary DNA (capture DNA、target DNA) to observe the variety of electric characteristic. Attempt to make different fabrication process and find out the lowest of the DNA concentrations that want to be measured. This kind of experiment can supply the information to develop the biochip and bionanotechnology.
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