A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering
碩士 === 國立清華大學 === 材料科學工程學系 === 93 ===
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56904734316100832593 |
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ndltd-TW-093NTHU5159083 |
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oai_dc |
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ndltd-TW-093NTHU51590832016-06-06T04:11:35Z http://ndltd.ncl.edu.tw/handle/56904734316100832593 A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering 以反應式直流濺鍍法製備Al-Cr-Mo-Si-Ti高熵氮化物薄膜及其性質探討 Hui-Wen Chang 張慧紋 碩士 國立清華大學 材料科學工程學系 93 Jien-Wei Yeh 葉均蔚 2005 學位論文 ; thesis 93 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 材料科學工程學系 === 93 ===
|
| author2 |
Jien-Wei Yeh |
| author_facet |
Jien-Wei Yeh Hui-Wen Chang 張慧紋 |
| author |
Hui-Wen Chang 張慧紋 |
| spellingShingle |
Hui-Wen Chang 張慧紋 A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| author_sort |
Hui-Wen Chang |
| title |
A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| title_short |
A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| title_full |
A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| title_fullStr |
A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| title_full_unstemmed |
A Study on Nitride Films of Al-Cr-Mo-Si-Ti High-Entropy alloy by Reactive DC Sputtering |
| title_sort |
study on nitride films of al-cr-mo-si-ti high-entropy alloy by reactive dc sputtering |
| publishDate |
2005 |
| url |
http://ndltd.ncl.edu.tw/handle/56904734316100832593 |
| work_keys_str_mv |
AT huiwenchang astudyonnitridefilmsofalcrmositihighentropyalloybyreactivedcsputtering AT zhānghuìwén astudyonnitridefilmsofalcrmositihighentropyalloybyreactivedcsputtering AT huiwenchang yǐfǎnyīngshìzhíliújiàndùfǎzhìbèialcrmositigāoshāngdànhuàwùbáomójíqíxìngzhìtàntǎo AT zhānghuìwén yǐfǎnyīngshìzhíliújiàndùfǎzhìbèialcrmositigāoshāngdànhuàwùbáomójíqíxìngzhìtàntǎo AT huiwenchang studyonnitridefilmsofalcrmositihighentropyalloybyreactivedcsputtering AT zhānghuìwén studyonnitridefilmsofalcrmositihighentropyalloybyreactivedcsputtering |
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