The research of molybdenum oxides nanostructure synthesized by MPECVD
碩士 === 國立清華大學 === 材料科學工程學系 === 93 === When in nano-scale, materials bear different characteristics, such as optical, electrical, and magnetic properties. Molybdenum is an important refractory metal; it has a very high melting point and high electrical conductivity. Mo oxides are widely used in catal...
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ndltd-TW-093NTHU51590462016-06-06T04:11:21Z http://ndltd.ncl.edu.tw/handle/57577581522766255657 The research of molybdenum oxides nanostructure synthesized by MPECVD 藉微波電漿輔助化學氣相沈積系統研究氧化鉬奈米材料 Kong-Pin Chang 張宮賓 碩士 國立清華大學 材料科學工程學系 93 When in nano-scale, materials bear different characteristics, such as optical, electrical, and magnetic properties. Molybdenum is an important refractory metal; it has a very high melting point and high electrical conductivity. Mo oxides are widely used in catalysts, sensors, photochromic and electrochromic materials. In this research, we synthesize Mo oxides nano structure by MPECVD (microwave plasma enhanced chemical vapor deposition). The morphology of Mo oxides is slab. Its thickness, width, and length are respectively 20~100nm, 200~600nm, and 1~2μm. Large amounts of single-crystal MoO3 nanoslabs are obtained on silicon wafer by using Pt and Au at catalysts or not using any catalysts. It has large effects on the morphology of MoO3 by changing reaction time and gas flowing rate. By using scanning electron microscopy, we can see the morphology and growing mechanism of Mo oxides. X-ray and transmission electron microscopy indicated the structure of Mo oxides was MoO3 with orthorhombic structure. By Raman spectroscopy, we can tell the differences among three different kinds of Molybdenum-oxide bonding. Cathodoluminescene shows great red-orange peak at 622nm of MoO3. Although MoO3 can be synthesized by using catalysts, we can not find them in SEM. By observing the cross section of sample we conclude vapor-solid is the portable growing mechanism. Han C. Shih 施漢章 2005 學位論文 ; thesis 69 zh-TW |
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碩士 === 國立清華大學 === 材料科學工程學系 === 93 === When in nano-scale, materials bear different characteristics, such as optical, electrical, and magnetic properties. Molybdenum is an important refractory metal; it has a very high melting point and high electrical conductivity. Mo oxides are widely used in catalysts, sensors, photochromic and electrochromic materials. In this research, we synthesize Mo oxides nano structure by MPECVD (microwave plasma enhanced chemical vapor deposition). The morphology of Mo oxides is slab. Its thickness, width, and length are respectively 20~100nm, 200~600nm, and 1~2μm. Large amounts of single-crystal MoO3 nanoslabs are obtained on silicon wafer by using Pt and Au at catalysts or not using any catalysts. It has large effects on the morphology of MoO3 by changing reaction time and gas flowing rate.
By using scanning electron microscopy, we can see the morphology and growing mechanism of Mo oxides. X-ray and transmission electron microscopy indicated the structure of Mo oxides was MoO3 with orthorhombic structure. By Raman spectroscopy, we can tell the differences among three different kinds of Molybdenum-oxide bonding. Cathodoluminescene shows great red-orange peak at 622nm of MoO3. Although MoO3 can be synthesized by using catalysts, we can not find them in SEM. By observing the cross section of sample we conclude vapor-solid is the portable growing mechanism.
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Han C. Shih |
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Han C. Shih Kong-Pin Chang 張宮賓 |
author |
Kong-Pin Chang 張宮賓 |
spellingShingle |
Kong-Pin Chang 張宮賓 The research of molybdenum oxides nanostructure synthesized by MPECVD |
author_sort |
Kong-Pin Chang |
title |
The research of molybdenum oxides nanostructure synthesized by MPECVD |
title_short |
The research of molybdenum oxides nanostructure synthesized by MPECVD |
title_full |
The research of molybdenum oxides nanostructure synthesized by MPECVD |
title_fullStr |
The research of molybdenum oxides nanostructure synthesized by MPECVD |
title_full_unstemmed |
The research of molybdenum oxides nanostructure synthesized by MPECVD |
title_sort |
research of molybdenum oxides nanostructure synthesized by mpecvd |
publishDate |
2005 |
url |
http://ndltd.ncl.edu.tw/handle/57577581522766255657 |
work_keys_str_mv |
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