Construct a Framework for Equipment Performance Management and a Study for Promoting Tool Productivity in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === In order to define and measure the overall performance of equipment, Overall Equipment Efficiency (OEE) has been proposed to consider the trade-off between traditional stand-alone metrics. OEE represents a comprehensive index for single equipment performance....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25458527343682154215 |