Constructing a Metrology Sampling Framework for In-line Inspection in Semiconductor Fabrication and Its Decision Analysis
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === Abstract A number of inspection and measurement stations are set in the fabrication process to ensure that the quality of wafer meets the requirement. Because of the limited capacities and costs for in-line wafer inspections, only certain wafers are inspected...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38725120406504350222 |