Using CTPN to Model a Hybrid Material Handling System in a 300 mm Fab
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === This study investigates the transportation problems in the semiconductor fabrication. Due to the weight and size of the 300 mm wafer lot, it is difficult to transport lots by operators, and therefore the automated material handling system (AMHS) is widely emp...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70070981111778167301 |