The Squeeze Film Damping Effect on Electro-Micromechanical Resonators

• Main Authors: Chi-wei Chung, 張致瑋
• Other Authors: Jao-Hwa Kuang
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/01331413373254859960

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 93 === This paper is going to emphasize on the air squeeze film damping effect on micro-mechanical resonant beam in MEMS. In general, the low energy density of electrode force will cause high-voltage power supply to drive the electro- micro resonators; reducing the distance between the electrode and resonant beam can be the most efficient way to solve this problem. But bringing different exciting frequency of system and environmental pressure to the air squeeze film effect might cause it changes form similarly to the damping qualities, and this will also change the dynamic characteristics of micro resonator. The dynamic model for double clamped micro-mechanical resonant beam is proposed by using Lagrange’s equation in this study. The corresponding eigenvalue problems of resonant beam are formulated and solved by employing the hypothetical mode method. Under the presumption of viscous damping model, we may obtain a damping factor which includes the parameters of size, temperature and air pressure when energy transfer model is employed to simulate the squeeze film damping effect of two immediate objects. Eventually, the damping ratio and the dynamic characteristics of resonant microbeam are derived by means of exploring the frequency response function of system. Besides, the frequency change of micro-mechanical resonant beam due to an axial force is also considered in the thesis.