Integrated Optimal Design of A machined Vibrating Rate Gyroscope

• Main Authors: Li-Min Huang, 黃禮民
• Other Authors: Chen-Jung Li
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/61543176679969358208

碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 93 === This research provides an integrated optimal design method for the design of the micromachined vibrating rate gyroscope. First, to maximize the performance, a decoupled microgyro structure is designed such that the coupling between the driving mode and the sensing mode is reduced. The BELST fabrication process is adopted for the design. Then the integrated optimal design method integrates the comb-drive actuation, structural vibration, displacement sensing, and electronic circuit. Based on the objective function, the signal-to-noise ratio, the real-number genetic algorithm is utilized to obtain the optimal parameters for both the gyro structure and the electric circuit for its signal conditioning. The results show that the frequency matching in both the actuating and sensing directions is reached for the optimized gyro design. This design method makes the design much easier and more efficiency for the gyro with multiple key parameters.