The Fabrication of High-Aspect-Ratio Microstructure Using the Swelling Phenomenon of Polymers

• Main Authors: Che-Hao Chang, 張哲豪
• Other Authors: Mao-Kuo Wei
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/86303426623913014689

碩士 === 國立東華大學 === 材料科學與工程學系 === 93 === Abstract This study will discuss the usage of organic materials to make high-aspect-ratio microstructures. Four kinds of organic materials have been studied about their capabilities of water absorption and volume expansion when immersed in the electrolyte. Finally, red beam seems to be the best candidate for the fabrication of high-aspect-ratio microstructures. In this study, the holes were drilled on the organic material, the diameter of the holes decreased when the organic material was immersed in the electrolyte. This phenomenon is due to the constraint of the outer surface of the material and volume expansion after water absorption. In addition, we try to use Fickian diffusion equation in spherical coordinates to explain the diffusion mechanism of the red beams.