Anti-Reflection Coating on Plastic Substrate Treated by Low Pressure Plasma

• Main Authors: Shuan-Wen Wang, 王宣文
• Other Authors: Cheng-Chung Lee
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/82016976011660980833

碩士 === 國立中央大學 === 光電科學研究所 === 93 === The application of plastic substrates in optical components increased recently. The limitation in using plastic substrates for optical components was the poor adherence between thin films and substrates. This research focused on plasma surface treatment to enhance the adhesion. The change of surface roughness, chemical bonding, substrate transmittance with different gas and pre-treatment power was investigated. In addition, we coated Ta2O5 single layer on substrates after pre-treatment to find out the phenomenon of the inhomogeneity as well as the adhesion degree between Ta2O5 and plastic substrate. The results revealed that the improvement of adhesion related to plasma power and pre-treatment time. It took shorter time to reach good adhesion under high plasma power, while longer time under low plasma power. But, high power plasma treatment caused substrate overheated due to the volatile interaction between plasma and substrates. So we chose low power treatment with longer time as well as cathode cooling. Finally, it is found that by refining the design of anti-reflection coating with an interface layer, an anti-reflection coating on plastic substrates with good adhesion can be made.