Fabrication of Super Hydrophobic Surface and Application of Nanoimprint Lithography with Low Surface Energy Material
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 93 === There are two major topics in my research. One is the research of super hydrophobic surface. The other one is nanoimprint lithography. The following is the first major topic. We coat polymer on the wafer and then deal with surface by plasma. We can obtain su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98481467174309309977 |