The Study of Glass-to-metal Sealing Technology

• Main Authors: Hui-Ta Chen, 陳輝達
• Other Authors: Chang-Pin Chou
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/05151414703345452276

碩士 === 國立交通大學 === 機械工程系所 === 93 === Glass-to-metal sealing technology is usually used for the device of high hermeticity and excellent electrical insulation. The main application areas include mechanical, optoelectronics, telecommunication, automotive and biomedical industry. There are two problems in glass-to-metal sealing. One is the bad adhesion between glass and metal, and the other is the fracture of glass. For the glass-to-metal sealing technology, to control precisely metal oxide layer and wetting between glass and metal interfacial zone are two important factors. The purpose of this paper is to study the technology about glass-to-metal sealing. The first is to determine the influence of temperature and time to oxidation of Kovar alloy. The second is to study the wetting behavior between glass and metal interface. The third is to investigate the situation of glass-metal sandwich seal. Kovar Fe-Ni-Co alloy, glass powders ASF110, ASF200R and ASF700 were used in the study. Oxidation experiment, wetting experiment and sealing experiment were conducted. From the experiment results, it is found that the best preoxidation treatment for sealing is heating to 700℃ and maintaining for 10 min. Wetting on preoxidative Kovar alloy is better than Kovar alloy with no preoxidation treatment. Si can diffuse into Kovar alloy and Fe-Co-Ni can diffuse into glass in the glass-metal sandwich seal. Treatment of heating to 980℃in argon atmosphere can increase the distance of diffusion and to enhance the glass-to-metal adhesion.