The Influence of Si Oxidation due to Thin Ge Layers

The Influence of Si Oxidation due to Thin Ge Layers

碩士 === 國立交通大學 === 物理研究所 === 93 ===

Bibliographic Details
Main Author:	張君黛
Other Authors:	Deng-Sung Lin
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/03680268523791237925

Similar Items

Growth and characterization of thin oxide films on SiGe
by: Zheng, Lan
Published: (2009)

Growth and characterization of thin oxide films on SiGe
by: Zheng, Lan
Published: (2009)

Research on Material Properties of SiGe Epitaxial Thin Film and Fabrication of SiGe Nanostructures
by: Yuan-Ming Chang, et al.
Published: (2009)

The Study of the Sensitivity of SiGe Nanowire Bio-sensor Device Fabricated with Multi-layer (oxide/SiGe/Si-on-insulator) Structure
by: Hsieh, Cheng-Ting, et al.
Published: (2011)

Study on Recrystallization of a-SiGe:H Thin-Film and Fabrications of poly-SiGe and a-SiGe:H Thin-Film Transisters
by: Shuh-Yuan Yang, et al.
Published: (1995)

Graded intrinsic-layer a-SiGe:H thin-film solar cells
by: Ying-Ming Chiang, et al.
Published: (2012)

Ge distribution in Si0.9Ge0.1 alloy ingot grown from thin melt layer
by: Michael A. Gonik, et al.
Published: (2016-12-01)

Synthesis of Ge1-xSnx Alloy Thin Films by Rapid Thermal Annealing of Sputtered Ge/Sn/Ge Layers on Si Substrates
by: Alrokayan, S, et al.
Published: (2018)

Synthesis of Ge1-xSnx alloy thin films by rapid thermal annealing of sputtered Ge/Sn/Ge Layers on Si substrates
by: Alrokayan, S., et al.
Published: (2018)

Strain-relaxation of Si/SiGe layers on insulator
by: Po-Wen Chen, et al.
Published: (2004)

The study of Low Temperature Nano-crystal SiGe Thin Film Prepared by PECVD with Layer-By-Layer Technology
by: Ping-Chang Lin, et al.
Published: (2005)

Oxidation of GeSi and applications
by: Liu, Wen-Shu
Published: (1994)

Crystallization Behaviors of Amorphous Si and SiGe Thin Films
by: Chih-Hao Yu, et al.
Published: (2005)

Effect of the high-temperature oxidation on material and mechanical properties of Si/SiGe multi-layer heterostructures
by: Lin-Hao,Peng, et al.
Published: (2011)

A study of the high-temperature oxidation and nanoindentation behaviors of the SiGe thin film
by: Chu, Chen-Tzu, et al.
Published: (2010)

Study on Formation of Ge Nanocrystal using SiGeO and SiGeN layer for Nonvolatile Memory Applications
by: Yen-Ting Hsieh, et al.
Published: (2007)

Thermal Behaviors of Interface Layer in ultra-thin HfO2 film grown on SiGe/Si substrate
by: Yu-Kai Liu, et al.
Published: (2014)

Effects of P-Type Layer and Transparent Conducting Oxides Film on Ge-on-Si Photodetector
by: Lu-Tzu Liu, et al.
Published: (2016)

Impact of doping on epitaxial Ge thin film quality and Si-Ge interdiffusion
by: Guangnan, Zhou
Published: (2017)

The Study of SiGe Oxidation Process
by: Yuen-Chang Chan, et al.
Published: (1996)

The characteristics of NiCo thin film on Si and SiGe substrates
by: Chi-Hsuan Cheng, et al.
Published: (2014)

Thermal studies of individual Si/Ge heterojunctions — The influence of the alloy layer on the heterojunction
by: Sien Wang, et al.
Published: (2020-06-01)

Elastically strained GeSiSn layers and GeSiSn islands in multilayered periodical structures
by: Vyacheslav A. Timofeev, et al.
Published: (2017-06-01)

The Study of Hall Effect in Polycrystalline Si & SiGe Thin Films
by: Hsiao-Yi Lin, et al.
Published: (1993)

Characterization of Nanocrystalline SiGe Thin Film Solar Cell with Double Graded-Dead Absorption Layer
by: Chao-Chun Wang, et al.
Published: (2012-01-01)

Nano-structure of Mesoporous( Si/MCM-41& Pt/Si/MCM-41)Thin Film and ( GeSi/Ge) Interface
by: Cheng,Cheng-Wen, et al.
Published: (2002)

The Study of Ge Schottky photodetector with a-Si:H capping layer
by: En Hao Zhang, et al.
Published: (2010)

Formation of Nanopits in Si Capping Layers on SiGe Quantum Dots
by: Cui Jian, et al.
Published: (2011-01-01)

Anodic Oxidation of SiGe and Its Application to the Functional Enhancement of SiGe MSM Photodetectors
by: Huai-tzu Chiang, et al.
Published: (2007)

Performance, Reliability and Manufacturability of Polycrystallized-Si/SiGe on Thin-Film Transistors
by: Du-Zen Peng, et al.
Published: (2003)

Buffer layer-assisted growth of Ge nanoclusters on Si
by: Li AP, et al.
Published: (2006-01-01)

Germanium segregation in CVD grown SiGe layers
by: Novikau Andrei, et al.
Published: (2010-02-01)

Photoreflectance of layered SiGe and III-V semiconductors
by: Hall, David J.
Published: (1996)

Nove l Low Temperature Poly-Si Thin Film Nonvolatile Memory with Ge nanocrystals Trapping Layer
by: Jyun-Shiang Huang, et al.
Published: (2006)

Effects of surface tunneling in Si/SiGe and Ge/GeSi heterostructures
by: Yi-Hsin Su, et al.
Published: (2017)

Synthesis of Ge<sub>1−x</sub>Sn<sub>x</sub> Alloy Thin Films by Rapid Thermal Annealing of Sputtered Ge/Sn/Ge Layers on Si Substrates
by: Hadi Mahmodi, et al.
Published: (2018-11-01)

Hole Transport Characteristic Of Wrinkling SiGe Thin Film
by: Wei-Yu Ma, et al.
Published: (2007)

Growth and Optical Properties of Si/SiGe Strained-Layer Superlattices by MBE
by: Yih-Fu Wong, et al.
Published: (2005)

Theoretical Studies of Acceptor States in Strained SiGe Layer Grown on Si
by: Cho Chiou-I, et al.
Published: (2003)

Optical Properties of Ge Dots Formed by Oxidation of Poly-SiGe and Photodiode
by: Pei-Cheng Su, et al.
Published: (2005)