The Development of a Software simulator with Trainer of Chemical Vapor Deposition Equipment for Cluster Tool Manufacturing
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 93 === This thesis is to design a simulator incorporated with trainer of a chemical vapor deposition system for 300mm cluster tool in semiconductor manufacture. The integration of simulator and trainer has many advantages that the commercial trainers can not...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35100379881399037303 |