The Development of a Software simulator with Trainer of Chemical Vapor Deposition Equipment for Cluster Tool Manufacturing
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 93 === This thesis is to design a simulator incorporated with trainer of a chemical vapor deposition system for 300mm cluster tool in semiconductor manufacture. The integration of simulator and trainer has many advantages that the commercial trainers can not...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35100379881399037303 |
| Summary: | 碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 93 === This thesis is to design a simulator incorporated with trainer of a chemical vapor deposition system for 300mm cluster tool in semiconductor manufacture. The integration of simulator and trainer has many advantages that the commercial trainers can not provide. In addition to providing the functions available in the market, i.e. Human-computer Interface and normal operation, the developed trainer accepts any receipt by the operator then shows what the process is going on in terms of animation and process data display. It also provides fault modes to be adjusted on screen so that the operators can learn how to handle recovery modes. The user can thus change all set-ups on the user interface to learn the impact of each value on the production and become more familiar with the relationship between the whole processing and equipments.
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