Numerical correction for the azimuth deviation of polarizer and analyzer in PSA ellipsometry
碩士 === 國立交通大學 === 光電工程系所 === 93 === This work presents a novel technique to determine the ellipsometric parameters and the azimuth deviations of the polarizer and analyzer in a polarizer- sample-analyzer ellipsometer. We will prove that this technique only needs six intensity measurements to extrac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00082972595133083149 |