Numerical correction for the azimuth deviation of polarizer and analyzer in PSA ellipsometry

• Main Authors: Yi-De Lin, 林奕德
• Other Authors: Yu-Faye Chao
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/00082972595133083149

碩士 === 國立交通大學 === 光電工程系所 === 93 === This work presents a novel technique to determine the ellipsometric parameters and the azimuth deviations of the polarizer and analyzer in a polarizer- sample-analyzer ellipsometer. We will prove that this technique only needs six intensity measurements to extract the ellipsometric parameters and the azimuth deviations. The six intensity measurements is to perform two sets of this three-intensity measurement with the polarizer’s azimuth at 45o and -45o, respectively, we can obtain a set of ellipsometric parameters, which are free from the azimuth deviations of polarizer and analyzer. The ellipsometric parameters can be used to deduce the thickness of the thin film and incident angle. By this method, we can get the optimized parameters of the thin film, reduce the time of measurement, and raise its accuracy.