Applying Soft Computing Approaches to Search Shop Floor Control Strategies in Wafer Fabrication

博士 === 國立交通大學 === 工業工程與管理系所 === 93 === The semiconductor manufacturing industry is one of the most important industries in Taiwan. Wafer fabrication is an essential process in semiconductor manufacturing. However, controlling the production system on the shop floor is extremely difficult owing to th...

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Bibliographic Details
Main Authors: Chao-Yang Liu, 劉朝陽
Other Authors: D. Y. Sha
Format: Others
Language:en_US
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/51786669908652400329