The Study of Ultra-Thin Oxide Behavior under Nano-Scaled Stress by Conductive Atomic Force Microscopy
碩士 === 國立暨南國際大學 === 電機工程學系 === 93 === Abstract The main purpose of this thesis is to study the degradation and breakdown behavior of the ultra-thin oxide under nano-scaled stress by conductive atomic force microscopy. It has been well recognized that the breakdown and degradation characteristics o...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74629145850440382426 |