| Summary: | 碩士 === 國立成功大學 === 微機電系統工程研究所 === 93 === Multifunctional diamond-like carbon (DLC) nanocomposite films containing a high concentration of TiO2 nanoparticles are to be synthesized for optical, tribological and MEMS applications. The nanocomposite films had good hydrophilic property under ultraviolet (UV) radiation and hardness of 13 GPa. The XRD, XPS, Raman, and TEM analysis revealed that the films were incorporated TiO2 and TiC nanoparticles in the DLC matrix. The nanocomposite films were highly abrasion-resistant and had long-life hydrophilic surface.
Hydrophilic and abrasion-resistant coatings have been needed for many optical applications. However, the hydrophilic surface cannot last long due to easy surface contamination. TiO2 surface are hydrophilic and have self-cleaning effect under sunlight or UV radiation, and thus remain hydrophilic all the time. However, TiO2 films are not abrasion-resistant, and TiO2 particles are easily scraped off the surface due to oxidation of the binder. On the other hand, DLC film is highly abrasion-resistant and chemically inert, and thus able to resist oxidation.
DLC films were deposited using acetylene as the carbon source, and argon was used to sputter TiO2 target. By incorporating TiO2 nanoparticles in the DLC film, the nanocomposite films will be highly abrasion-resistant and have long-life hydrophilic surface. Even after abrasion of the film, the film properties will remain unchanged since TiO2 nanoparticles are uniformly distributed throughout the DLC matrix. Under UV radiation the films can also be amphiphilic (i.e. both hydrophilic and oleophilic). Besides, they can be applied on various substrates, including glass and, particularly, plastics. They have great application potentials in optical components for anti-fogging purpose and in bio-MEMS devices to control fluid flow with UV light.
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