| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 93 === The purpose of this thesis is to develop and fabricate a bulge test system for the mechanical properties characterization of polymer materials such as PMMAs and CMP pads. The bulge equation is firstly developed to correlate the relationship between applied pressure and the resulted deformation for the system design and data reduction processes. By appropriately coordinate transformation from simple pressure-deformation coordinate into a modified pressure-deformation coordinate system, it is able to express the test data in a straight line manner. The slope and the intercept are then proportional to the biaxial modulus and the residual stress of the test specimen, respectively. The bulge system, containing a pressuring system, a chamber with pressure monitoring capability, a varying-diameter specimen holder, a temperature control unit, and a laser position sensor, is successful developed. This system is then verified by a series of test using PMMA. Thin PMMA sheets are then tested by this system. In parallel, their corresponded finite element (FE) simulations are also performed. By cross-checking the experimental data and FE simulation results, the bi-axial modulus of PMMA is obtained. The obtained results agree with that performed by standard uniaxial testing systems such as MTS Tytron. Finally, by utilizing this system, the bi-axial modulus of CMP pad Rodel IC 1010 are characterized at different temperatures, In the future, it is possible to use this system in MEMS thin film materials characterization. Furthermore, with a little modification, it is also possible to use this system to perform blister testing to characterize the adhesion between materials. In addition, by integrating this bulge test system with standard uniaxial tensile tester, it is possible to obtain the Young’s modulus and Poisson’s ratio for a specific material simultaneously.
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